Method of controlling metal oxidation during waveguide formation
US5242478A · kind A · utility
1Cited by
5References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 19, 1991 |
| Grant date | Sep 7, 1993 |
| Priority date | — |
| Expiry date | Dec 19, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/132
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical waveguide forming process is disclosed which enables glass waveguides to be deposited on metalized substrates without substantial degradation of the wiring of the substrate. The process involves the use of carbon material to protect the metal wiring on or embedded in the substrate during the consolidation phase of the waveguide formation. The carbon plate reacts readily with oxygen impurities to control the oxygen partial Pressure during the consolidation phase.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.