Apparatus for the continuous coating of band-type substrate

US5242500A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Bjoern Elvers · Großkrotzenburg, DE
• Klemens Ruebsam · Bad Orb, DE
• Jochen Heinz · Flintbek, DE
• Georg Harwarth · Alzenau, DE
• Ulrich Reibold · Wilhelmsfeld, DE
• Norbert Ross · Maintal, DE
• Helmut Grimm · Mountainside, US

Key dates

• Filing date: May 18, 1992
• Grant date: Sep 7, 1993
• Expiry date: May 18, 2012

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/562
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

An apparatus for the continuous coating of band-type substrates in a vacuum chamber comprises a plurality of evaporation vessels 1, 1', . . . of the same size and configuration. These vessels form a row of evaporation vessels aligned with the direction of movement of the band and are spaced approximately equally apart. All vessels are made of an electrically conductive, ceramic material and can be heated by directly passing a current. Provision is made for a device for the continuous supply of wire to be evaporated to the evaporator vessels. The individual evaporator vessels 1, 1', . . . of the row are offset with respect to one another. Together, they cover a small coating zone B which extends transversely to the direction of movement A of the band.