Patent · US Expired

Semiconductor memory device

US5243559A · kind A · utility

53Cited by
5References
23Claims
0Family size

Assignee

Inventor

Key dates

Filing dateDec 12, 1991
Grant dateSep 7, 1993
Priority date
Expiry dateDec 12, 2011

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/681
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

A semiconductor memory device including a semiconductor substrate of a first conduction type, a memory cell having a floating gate and a control gate which are formed on a main surface of the semiconductor substrate and stacked with an interlayer insulating film interposed therebetween and having a three-layer structure of an oxide film, a nitride film and another oxide film, a decoder for supplying a voltage to the memory cell, a first well formed on the substrate surface and having a second conduction type different from the first conduction type, and a second well formed in the first well and having the first conduction type, wherein one of the memory cell and the decoder is formed in the second well.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.