Component surface distortion evaluation apparatus and method
US5243665A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 22, 1992 |
| Grant date | Sep 7, 1993 |
| Priority date | — |
| Expiry date | Jan 22, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67242
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system is disclosed which operates to collect high resolution three-dimensional surface mesh data from mechanical components which are used for component evaluation. The system includes a multidimensionally movable fixture mount for holding the mechanical components. A structured light pattern emitting projector is provided together with an image sensing camera for detecting impingement of the light pattern on the mechanical component and for generating the surface data. A set of software tools analyzes the data to provide numerical or quantitative component analysis and further presents the data in display form to allow intuitive or qualitative analysis for product and process improvement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.