Fabrication of an electronic microvalve apparatus
US5244537A · kind A · utility
161Cited by
3References
3Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 22, 1992 |
| Grant date | Sep 14, 1993 |
| Priority date | — |
| Expiry date | Sep 22, 2012 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K2099/008
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An electronic microvalve design and fabrication process for a miniature gas valve. In this microvalve design an objective is to minimize the operating voltage of the valve and minimize the force necessary to close the valve and hold it tightly closed against high gas pressures. The microvalve is an integral structure made on one piece of silicon and is a flow through valve with inlet and outlet on opposite sides of the silicon wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.