Process for depositing a thin layer of a ceramic composition and a product obtained thereby
US5244691A · kind A · utility
6Cited by
7References
6Claims
0Family size
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Key dates
| Filing date | Nov 20, 1990 |
| Grant date | Sep 14, 1993 |
| Priority date | — |
| Expiry date | Nov 20, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31678
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A process for depositing a thin layer of a ceramic composition on a substrate, which comprises: PA0 a) dissolving basic constituents of the ceramic composition, which are added in simple or mixed form to a solvent; PA0 b) adding to the solution, acetylacetone and hexamethylene tetramine in proportions suitable to the deposit method used; PA0 c) maturing or polymerizing the substance obtained in step b); PA0 d) depositing a layer of the substance on a substrate; PA0 e) drying the deposited layer, and PA0 f) sintering the layer deposited at low temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.