Microtip, process for preparation thereof, surface-observing apparatus and information-treating apparatus employing the same
US5245187A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 26, 1992 |
| Grant date | Sep 14, 1993 |
| Priority date | — |
| Expiry date | Feb 26, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/888
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microtip has a tip portion formed by gathering of three crystal faces of a single crystal, at least one of the crystal faces being an etched face at and around the tip portion. The microtip is produced by breaking and splitting a single crystal by applying a stress, and subjecting the face formed by breaking of the single crystal to anisotropic etching by utilizing facial orientation, thus forming a tip portion as a gathering point of three crystal faces of the single crystal. A surface-observing apparatus for observing a surface of a specimen and an information-treating apparatus comprise a tip in proximity to the specimen to be observed or a recording medium, and conduct the surface observation or the writing or reading by using the tip, respectively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.