Patent · US Expired

Patterned dichroic filters for solid state electronic image sensors

US5246803A · kind A · utility

37Cited by
14References
3Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 16, 1992
Grant dateSep 21, 1993
Priority date
Expiry dateMar 16, 2012

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/0007
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Forming a color filter by vacuum depositing alternating layers of SiO.sub.2 and TiO.sub.2 at a temperature of less than 150.degree. C.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.