Tandem linear scanning confocal imaging system with focal volumes at different heights
US5248876A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 21, 1992 |
| Grant date | Sep 28, 1993 |
| Priority date | — |
| Expiry date | Apr 21, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/004
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A confocal imaging system utilizes an opaque mask with a slit and a row of pinpoint sensors or utilizes an opaque mask with a skewed pattern of pinholes and an array of isolated pinpoint sensors in a matching pattern in order to obtain sufficient data to provide a complete image for imaging and/or inspecting an object such as electronics in a single one-dimensional scan. The system also simultaneously produces multiple images at different heights in the single one-dimensional scan of the viewed object, and also simultaneously produces images taken in different spectral bands in the same one-dimensional scan of the object to be imaged and/or inspected. The relative height or depth of the different images can be modified by simply adjusting the inclination between the confocal imaging system and a path followed by the object that is to be imaged and/or inspected during the one-dimensional scan. The optical confocal imaging system requires no moving parts and the only moving parts of the system are for motorized conveying of the object to be imaged and/or inspected along the path. In one arrangement of the confocal imaging system, color imaging and/or inspecting of the object can be p…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.