Optical device with an optical coupler for effecting light branching/combining and a method for producing the same
US5249244A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 12, 1992 |
| Grant date | Sep 28, 1993 |
| Priority date | — |
| Expiry date | Mar 12, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/136
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed are an optical device having an optical coupler and a method for fabricating the optical device. The optical device includes a semiconductor crystal and a waveguide formed on the semiconductor crystal. The waveguide includes an etched portion having a predetermined pattern and a predetermined depth. A re-grown portion is formed in the etched portion of the waveguide. A coupler portion containing a recess is formed in the re-grown portion. The coupler portion effects at least one of a branching and a combining of the light propagated through the waveguide. In a method for fabricating the device, the etched portion is formed typically by ion beam etching, and the recess is formed typically by focused ion beam etching. In the method, the etching and the re-growth are performed using the same mask material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.