Micromechanical structure

US5252294A · kind A · utility

Assignee

• Messerschmitt Bolkow Blohm GmbH · DE

Inventors

• Walter Kroy · Ottobrunn, DE
• Helmut Seidel · Starnberg, DE
• Eduard Dette · Vagen, DE
• Max Koniger · Pullach, DE
• Peter Deimel · Langenpreising, DE
• Florian Binder · Traunstein, DE
• Reinhold Hilpert · Moorenweis, DE

Key dates

• Filing date: Feb 3, 1992
• Grant date: Oct 12, 1993
• Expiry date: Feb 3, 2012

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2201/0622
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical structure with cavities, containers, openings, canals, depressions, humps or the like for examinations of sample substances for possible changes of physical and/or chemical properties with targeted evaluation and documentation for the purposes of biotechnology, gene technology, cell and immune research and other medical, agricultural and environment research, where the structure consists of semiconducting material (of the group III to V of the elements of the periodic system) or contain the latter or glass or ceramic, diamond, or carbon and is made by a masking technique, especially by a chemical etching technique.