Cushioned cover for disk container
US5253755A · kind A · utility
40Cited by
11References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 20, 1991 |
| Grant date | Oct 19, 1993 |
| Priority date | — |
| Expiry date | Mar 20, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67369
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A cushioned cover for a wafer carrier having panel portions overlying and closing the top of the carrier and end walls with offsets, closing the U-shaped end walls of the carrier, a removable cushioning device in the cover having a single row of hold down elements mounted on flexible horizontal arms allowing up and down movement of the hold down elements to apply pressure against the edges of the wafers, the mounting arms of adjacent hold down elements being attached to opposite sides of the frame of the cushioning device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.