Open waveguide excimer laser
US5255282A · kind A · utility
14Cited by
11References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 25, 1991 |
| Grant date | Oct 19, 1993 |
| Priority date | — |
| Expiry date | Nov 25, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/225
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A gas laser of the excimer type in which an open waveguide is employed, in which the excimer medium is moved to and through the open waveguide in a direction transverse to the optical axis. A discharge cell is defined by the upper and lower slabs of the open waveguide, and if desired, a microwave source is provided which supplies microwave energy to the discharge cell volume to excite the excimer medium and to initiate discharge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.