Wafer carrier with wafer retaining cushions
US5255797A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Feb 26, 1992 |
| Grant date | Oct 26, 1993 |
| Priority date | — |
| Expiry date | Feb 26, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67373
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer carrier for circular semiconductor wafers and having slotted sidewalls; cushioning fingers protruding upwardly and obliquely inwardly through the slots in the sidewalls and engaging the wafers and directing pressure against the wafers in a slightly downwardly direction, toward the center of the wafer and toward the lower portion of the sidewall across from the finger applying pressure; the fingers located immediately adjacent above the horizontal centerline of the wafer; and a latch is provided for retaining the fingers against the wafers, but permitting the fingers to be swung outwardly through the slotted sidewalls for releasing the wafers during removal and insertion of the wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.