Method of producing metallic thin film sensors
US5256443A · kind A · utility
11Cited by
2References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 15, 1992 |
| Grant date | Oct 26, 1993 |
| Priority date | — |
| Expiry date | May 15, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/105
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A thin film made of a sol solution of noble metal alcoxides is formed on a substrate and then dried and baked in a reductive or oxidative atmosphere to produce a thin film of metals or metal oxides. The solution of noble metal alcoxides may contain merely a single component or a plurality of components. In addition, a solution of metal alcoxides with noble metal alcoxides as main components or additives may be used in place of the solution of noble metal alcoxides. The thin film of metals or metal oxides can be formed in a single layer or a plurality of layers on a substrate to improve, for example, the response of a sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.