Apparatus for placing film mask in contact with object
US5257067A · kind A · utility
1Cited by
4References
7Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Nov 22, 1991 |
| Grant date | Oct 26, 1993 |
| Priority date | — |
| Expiry date | Nov 22, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/0082
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A film mask is abutted to the object at the one side thereof then a fluid is introduced at an other side of the film mask so as to press the film mask to be placed in contact with the object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.