Patterened mirror vertical cavity surface emitting laser
US5258316A · kind A · utility
55Cited by
7References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 26, 1992 |
| Grant date | Nov 2, 1993 |
| Priority date | — |
| Expiry date | Mar 26, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S2301/166
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
VCSELs including a central active layer with upper and lower mirror stacks wherein a circular trench is formed in one mirror stack to define a lasing area. The trench reduces reflectivity to prevent lasing outside the operating area and an oxygen implant in the trench confines current distribution to maximize power output and efficiency. The trench allows self-alignment throughout most of the manufacturing process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.