Patent · US Expired

Semiconductor device having MOS transistor and a sidewall with a double insulator layer structure

US5258645A · kind A · utility

43Cited by
8References
8Claims
0Family size

Assignee

Inventor

Key dates

Filing dateSep 4, 1992
Grant dateNov 2, 1993
Priority date
Expiry dateSep 4, 2012

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/859

Abstract

A semiconductor device including a semiconductor substrate with a P-type well formed in the semiconductor substrate and a gate insulator layer formed on the semiconductor substrate. N-type diffusion regions are formed in the P-type well on both sides of the gate insulator layer. A gate electrode is formed on the gate insulator layer, where the gate electrode has top and side surfaces. The gate electrode and the N-type diffusion regions respectively form gate, source and drain of a N-channel MOS transistor. An insulating layer covers a portion of the N-type diffusion regions, the side surfaces of the gate electrode and at least a portion of the top surface of the gate electrode. The side wall layer which is made of an insulating material is formed on the insulating layer to provide a smooth coverage around the side of the gate electrode and aligns with an edge of said insulating layer which stops covering the N-type diffusion regions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.