Patent · US Expired

Device for mounting and transporting substrates in vacuum apparatus

US5259603A · kind A · utility

7Cited by

4References

9Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Michael Geisler · Apolda, DE
Michael Jung · Frankfurt am Main, DE

Key dates

Filing date	Jan 30, 1992
Grant date	Nov 9, 1993
Priority date	—
Expiry date	Jan 30, 2012

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB65G2249/02
WIPO fieldHandling
WIPO sectorMechanical engineering

Abstract

Device for mounting thin, preferably flat substrates (11, 11', . . . ) and for the transport of these substrates (11, 11'. . . ) in treatment apparatus, for example vacuum coating and etching apparatus, the device being formed by a frame (1), preferably in a rectangular shape, which is of such size that in the area surrounded by the frame (1) a support, e.g., a support formed of spoke-like round rods (6, 6', . . . ). can be inserted, and on this support fastening means for mounting the substrates (11, 11', . . . ) are provided, which hold the substrates (11, 11', . . . ) such that their substantially planar lateral surfaces run approximately parallel to the plane of the frame.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.