Organometallic compounds

US5259915A · kind A · utility

Assignee

• MERCK PATENT GESELLSCHAFT MIT BESHRANK TER HAFTUNG · DE

Inventors

• Ludwig Pohl · Darmstadt, DE
• Herbert Schumann · Berlin, DE
• Wilfried Wassermann · Berlin, DE
• Uwe Hartmann · Berlin, DE
• Thomas Seuss · Berlin, DE

Key dates

• Filing date: Mar 24, 1992
• Grant date: Nov 9, 1993
• Expiry date: Mar 24, 2012

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S526/943
• WIPO field: Organic fine chemistry
• WIPO sector: Chemistry

Abstract

The invention relates to organometallic compounds of the elements aluminum, gallium and indium which are two-fold intramolecularly stabilized, and to the use thereof for the production of thin films and epitaxial layers by deposition from the liquid or solid phase.