Vaporizer for vacuum coating apparatus
US5259941A · kind A · utility
15Cited by
8References
3Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 14, 1992 |
| Grant date | Nov 9, 1993 |
| Priority date | — |
| Expiry date | Feb 14, 2012 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/3407
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A vaporizer is described for use in an apparatus for the coating of substrate under vacuum, the vaporizer comprising a holder and a target plate releasably securable to the holder, with the target plate being acted on at its rear side by a coolant medium which flows through the holder. In order to make rapid interchange of the target plate possible while simultaneously optimizing the cooling, the target plate is fixed to the holder via a clamped connection with intermeshing clamping surfaces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.