Method of producing microstructures having regions of different structural height

US5260175A · kind A · utility

Assignees

• Kernforschungszentrum Karlsruhe GmbH · DE
• B urkert GmbH · US

Inventors

• Bernd Kowanz · Öhringen, DE
• Peter Bley · Blankenloch, DE
• Walter Bacher · Blankenloch, DE
• Michael Harmening · Hirschberg, DE
• Jurgen Mohr · Eppingen, DE

Key dates

• Filing date: Mar 31, 1992
• Grant date: Nov 9, 1993
• Expiry date: Mar 31, 2012

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S430/168
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method of producing microstructures having regions of different structural height includes providing a layer of positive resist material that is sensitive to X-ray radiation with microstructures on a side facing a source of X-rays. Using a mask, the layer of a positive resist material is partially irradiated with the X-rays. The irradiated regions are removed with the aid of a developer.