Measurements using balanced illumination optical microscopy
US5260558A · kind A · utility
2Cited by
5References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 20, 1992 |
| Grant date | Nov 9, 1993 |
| Priority date | — |
| Expiry date | May 20, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A technique for measuring the distance between the edges of a feature positioned on a substrate wherein the feature is illuminated with light on either side of the edges and the light intensities at either side of each of the edges are detected and are balanced at the detected light intensities regions sufficiently removed from the edges to prevent an adverse diffractive effect thereon so as to produce regions of minimum light intensity at the edges, the positions of which can be determined and the distance between said regions of minimum intensity can be measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.