Monolithic circuit with integrated bulk structure resonator
US5260596A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 8, 1991 |
| Grant date | Nov 9, 1993 |
| Priority date | — |
| Expiry date | Apr 8, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/2457
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A structure is provided to integrate bulk structure resonators into a monolithic integrated circuit chip. The chip also contains the remaining circuit components (17, 21, 24) required for the desired system function. Micromachining techniques are used to fabricate both support and a cavity (11, 27, 28) which allows mechanical vibration without interference. Alternative embodiments incorporate the use of non-piezoelectric mechanical resonators (14), quartz crystal resonators (18) and thin film piezoelectric resonators (22). Each type of resonator is used for the range of frequencies to which it is suited, providing a family of monolithic resonators capable of being used with integrated circuits having operating frequencies from a few hundred hertz to over 500 Mhz.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.