Evaporator boat for an apparatus for coating substrates
US5261964A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Apr 2, 1992 |
| Grant date | Nov 16, 1993 |
| Priority date | — |
| Expiry date | Apr 2, 2012 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/243
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An evaporator boat for an apparatus for coating substrates in a vacuum coating chamber consists of a shallow, trough-shaped piece of an electrically conductive material, the boat being heated by direct passage of current through it. The evaporator boat has an elongate hexagonal plan, the configuration of the recess within the boat for containing the material to be evaporated corresponding approximately to that of the boat. Lengthwise opposed ends of the evaporator boat are provided each with an approximately rectangular, perpendicular flat area. The flat areas together form two directly opposed parallel clamping surfaces of the evaporator boat so that when the evaporator boat is heated, two active evaporating zones form on both sides of the point of contact between the delivered wire and the evaporator boat.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.