Positioning control method and apparatus
US5262707A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | May 26, 1992 |
| Grant date | Nov 16, 1993 |
| Priority date | — |
| Expiry date | May 26, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D3/1436
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A positioning control method and apparatus in which a fine movement mechanism is moved without exceeding a movable area so that positioning of a large amount of displacement can be attained with high accuracy and high-speed positioning from a point to a point with the same control method. A coarse movement mechanism (101) has a large amount of movement and low positioning accuracy and a fine movement mechanism (102) on the coarse movement mechanism has a small amount of movement and high positioning accuracy. A signal E4 based on a error signal C4 of a movement command signal A4 of a signal generator (104) and a displacement signal B4 representative of a displacement of an object to be positioned with respect to a fixed position detected by an absolute position detecting device (105) is supplied to the fine movement mechanism and a coarse movement command signal M4, produced by adding a signal representative of a relative displacement of the fine movement mechanism (102) with respect to the coarse movement mechanism (101) detected by a relative position detecting device (133) to the error signal C4, is supplied to the coarse movement mechanism (101) to thereby control respective mo…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.