Specimen-driving apparatus for electron microscope which tilts and translates while preventing contact damage
US5264705A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 2, 1992 |
| Grant date | Nov 23, 1993 |
| Priority date | — |
| Expiry date | Apr 2, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/20
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A specimen-driving apparatus used with an electron microscope. The apparatus can translate or tilt the specimen holder while preventing it from being damaged if a human operator performs any erroneous operation. The device has X, Y, Z translation directive devices, and a tilt directive device for permitting the operator to enter instructions for translating and tilting the specimen holder. A contact detector senses that the holder is in contact with the upper magnetic pole piece. A tilt condition decision portion determines whether the holder has tilted into the positive or negative domain. A Z domain decision portion determines whether the Z coordinate of the holder lies in the positive or negative domain. When the contact of the holder with the pole piece is detected, reverse movement of the holder along the Z-axis is inhibited. Also, reverse tilting movement of the holder is inhibited. When the holder comes out of contact with the pole piece, these reverse movements are permitted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.