Diaphragm mounting system for a pressure transducer
US5264820A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 31, 1992 |
| Grant date | Nov 23, 1993 |
| Priority date | — |
| Expiry date | Mar 31, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0645
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure transducer for measuring high differential pressure media in a harsh environment where a diaphragm assembly is mounted to an intermediate support number which is mounted to a main support member where the high pressure media impinges on the diaphragm to create a force opposing that provided by the diaphragm support structure thereby loading the diaphragm in compression. The strain sensitive piezoresistive elements are protected and sealed from the low pressure media by a passivation layer and electrical signal leads are attached to bonding pads formed on the diaphragm assembly which are sealed to the intermediate support member by a sealing cap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.