Micro resonator
US5265479A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 29, 1992 |
| Grant date | Nov 30, 1993 |
| Priority date | — |
| Expiry date | Sep 29, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0011
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optically driven microresonator sensor comprising a sensor member having a vibratory bridge onto which a light beam is directed at a non-zero angle relative to a normal to said bridge, the light beam causing the bridge to oscillate at its resonant frequency, in use, in the direction of said normal, between a first position, where most of the incident light is reflected by the bridge to a light intensity measuring system, and a second position, where most of the incident light is not intercepted by said bridge, so that the reflected incident light sensed by said light intensity measuring system is reduced, the resonant frequency of oscillation of the bridge thus determined from said system, being dependent upon the nature of an applied force, such as stress, exerted on the sensor member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.