Electron microscope
US5266802A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 21, 1992 |
| Grant date | Nov 30, 1993 |
| Priority date | — |
| Expiry date | Dec 21, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2442
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron microscope capable of performing accurate x-ray analysis is provided. An objective lens having a bottom polepiece from which unwanted x-rays are not produced is attached to the electron microscope. An EDS (energy-dispersive x-ray spectrometer) detector is also attached to the electron microscope to make an x-ray analysis. A film consisting of a light element such as beryllium is coated on the top surface and the tapering portion of the bottom polepiece to prevent the electron beam transmitted through the sample or the secondary electrons and the scattered electrons emanating from the sample from colliding against the surface of the bottom polepiece; otherwise x-rays characteristic of Fe and Co would be generated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.