Process for forming anti-reflective coatings comprising light metal fluorides
US5268196A · kind A · utility
56Cited by
7References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 30, 1988 |
| Grant date | Dec 7, 1993 |
| Priority date | — |
| Expiry date | May 30, 2008 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2218/324
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
This invention is directed to a process for forming coatings comprising light metal fluorides on a substrate. More particularly, the coating comprising light metal fluorides is preferably made using sol-gel techniques and may comprise a concentration gradient of the light metal fluorides across the thickness of the coating to provide it with unique anti-reflective properties.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.