X-ray beam scanning method for producing low distortion or constant distortion in x-ray proximity printing
US5268951A · kind A · utility
14Cited by
4References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 22, 1992 |
| Grant date | Dec 7, 1993 |
| Priority date | — |
| Expiry date | Dec 22, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K1/06
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A x-ray scanning method involves the stops of directing an x-ray beam at a collimating first mirror having the capability of altering the source to mirror location and/or grazing angle of incidence. The beam is then reflected from a flat second mirror capable of a scanning motion by linear translation with an optional accompanying angular change in the grazing angle of incidence of the beam on the second mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.