Wafer carrier process platform
US5270482A · kind A · utility
4Cited by
2References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 28, 1992 |
| Grant date | Dec 14, 1993 |
| Priority date | — |
| Expiry date | May 28, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S269/903
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A process platform for wafer carriers having a floor and a handle extending upwardly from the floor to define two floor portions for engaging wafer carriers on either side of the handle. The floor portions feature structures for orienting the wafer carriers either parallel or perpendicular to the handle and a peripheral gridwork of openings to permit fluid to flow easily through the floor to the wafer carriers. The handle features openings to permit fluid flow therethrough and bifurcated portions extending between the handle and side portions of the floor to lend stiffness to the platform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.