Microwave plasma generating apparatus
US5270616A · kind A · utility
16Cited by
4References
15Claims
0Family size
Assignees
Inventor
Key dates
| Filing date | Oct 30, 1992 |
| Grant date | Dec 14, 1993 |
| Priority date | — |
| Expiry date | Oct 30, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/46
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microwave plasma generating apparatus radiates a microwave to a source gas to produce a plasma. A plurality of spaced fins are disposed in a path of travel of the microwave, from the microwave guide to an area of origin of the plasma within the plasma generating chamber to lie in a direction perpendicular to the direction of an electric field of the microwave, for the purpose of locking the position at which the plasma has been produced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.