White light interferometric device adapted to define an absolute reference position
US5270789A · kind A · utility
6Cited by
1References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 9, 1991 |
| Grant date | Dec 14, 1993 |
| Priority date | — |
| Expiry date | Oct 9, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/25
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical device utilizing white light interferometry, having a Fabry-Perot interferometer incorporated in a reference branch of the optical device. The succession of interference products occurs from a combination of the light traveling through the transmission branch with the light traveling through the reference branch which has undergone 0 to N+1 reflections in the Fabry-Perot interferometer. The interference product gives a series of equally spaced absolute marks.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.