Discharge excitation gas laser device
US5271026A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 18, 1991 |
| Grant date | Dec 14, 1993 |
| Priority date | — |
| Expiry date | Dec 18, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/0977
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In a discharge excitation gas laser device such as an excimer laser device provided with laser medium gas and a pair of electrodes opposite to each other in a gas-tight vessel, the laser medium gas is discharge-excited while inverting the polarity of a DC pulse voltage applied to the pair of electrodes opposite to each other for every pulse. In this way distribution of atoms and ions constituting the laser medium gas in the discharge region including the neighborhood of the main electrodes is made uniform even at a high repetition rate oscillation. Thus it is possible to realize a discharge excitation gas laser device having a good stability of DC pulse discharge without increasing unnecessarily the flow speed of the laser medium gas and no lowering in the pulse energy owing to a high efficiency operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.