Microvalve
US5271431A · kind A · utility
40Cited by
15References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 7, 1992 |
| Grant date | Dec 21, 1993 |
| Priority date | — |
| Expiry date | Aug 7, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/2224
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A microvalve in multi-layer structure is proposed, where an inlet connector, a return connector and an outlet connector are produced by planar structuring of material layers. The microvalve has a first and a second stage, which is disposed behind the first stage in respect to the flow direction of the fluid. In the first stage the flow direction of the fluid is directed into a cavity formed by two chambers by means of a flexible tongue, which in the position of rest is oriented parallel to the flow direction of the fluid. At least one outlet connector is disposed in the second stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.