Pyrophoric gas neutralization chamber
US5271908A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 7, 1992 |
| Grant date | Dec 21, 1993 |
| Priority date | — |
| Expiry date | Apr 7, 2012 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/00768
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A pyrophoric gas neutralization chamber is disclosed. The chamber can be used to neutralize a stream of spent process gas from, for example, a chemical vapor deposition process containing, for example, silane. The disclosed chamber is a multi-tiered structure which provides a turbulent flow of air and gas which provides for a controlled neutralization reaction. The chamber operates over a wide range of incoming pyrophoric gas flows to neutralize virtually all of the pyrophoric gas, such that the risk of explosion is eliminated. Finally, the disclosed chamber is inactive in that no fuel source, ignitors, or flame is required. The turbulence in the air/gas flow causes the pyrophoric gas to react with the air without an induced flame.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.