Alignment method for transfer and alignment device
US5272980A · kind A · utility
18Cited by
6References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 29, 1991 |
| Grant date | Dec 28, 1993 |
| Priority date | — |
| Expiry date | Aug 29, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S101/36
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
While a pattern side register mark provided on a pattern transferring plate provided with a transfer pattern and a work side register mark provided on a work are optically observed by means of an observation optical system, at least one of the pattern transferring plate and a work surface plate carrying thereon the work is moved in a non-contact state in accordance with information provided by the observation optical system to effect registration between the transfer pattern and the work, so that the pattern transferring plate is pressed to the work thereby to transfer the transfer pattern onto the work.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.