Igniter for microwave energized plasma processing apparatus
US5273587A · kind A · utility
14Cited by
9References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 4, 1992 |
| Grant date | Dec 28, 1993 |
| Priority date | — |
| Expiry date | Sep 4, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32449
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An igniter for a plasma processing apparatus comprises a hollow, at least partially microwave transmissive, body having a gas inlet and gas outlet passing therethrough. The geometry of the inlet and outlet are selected so that the outlet provides a greater impedance to gas flow than does the inlet. In this manner, there is provided a high pressure region in the igniter in which plasma ignition is facilitated. Ionized species generated in the igniter function to initiate plasma formation externally of the igniter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.