Coating apparatus
US5273636A · kind A · utility
3Cited by
5References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 16, 1992 |
| Grant date | Dec 28, 1993 |
| Priority date | — |
| Expiry date | Jun 16, 2012 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/505
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A substrate table (4) is fixed to a rotatably mounted hollow shaft (3) in a vacuum coating tank (1). The shaft (3) has a first portion passing sealingly through a wall of the tank and a second portion which has a larger diameter than the first portion in the tank. The first portion has axial supply passages connected to a chamber in the second portion where electrical connectors and coolant distribution means are housed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.