Preparation of diamond and diamond-like thin films
US5273788A · kind A · utility
41Cited by
15References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 20, 1992 |
| Grant date | Dec 28, 1993 |
| Priority date | — |
| Expiry date | Jul 20, 2012 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y40/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A layer of a hydrocarbon molecule is applied to a substrate by the Langmuir-Blodgett technique, and the surface is irradiated with a laser to decompose the layer of molecules at the surface without influencing the substrate. After decomposition the carbon atoms rearrange on the surface of the substrate to form a DLC film. The method of the invention may also be used to form other film, using a suitable molecule to produce the LB layer before irradiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.