Rotation rate sensor

US5275047A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Erich Zabler · Blankenloch, DE
• Jiri Marek · Reutlingen, DE

Key dates

• Filing date: Sep 12, 1991
• Grant date: Jan 4, 1994
• Expiry date: Sep 12, 2011

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5755
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A rotation rate sensor has a multi-layer structure, with an oscillatory body (13) formed in one carrier layer (10). The body can be stimulated to oscillate in a first oscillation direction (1). On top of this body (13), a further structural element (21), which is deflectable normal to the major surface of the carrier (10) and which serves to detect Coriolis acceleration, is located. There is a device for capacitive or piezo-resistive measurement of the deflection of the structural element. Preferably, the entire structure is fabricated from a silicon wafer, so that the measurement device can be integrated onto the sensor element.