Laser-assisted CVD process forming oxide superconducting films
US5276012A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Feb 11, 1992 |
| Grant date | Jan 4, 1994 |
| Priority date | — |
| Expiry date | Feb 11, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/734
Abstract
A method is disclosed of forming an oxide superconducting film comprising the steps of (1) mixing (a) the vapors of organic metal materials in such proportions as to provide a predetermined metal composition, or (b) said organic metal materials in such proportions as to provide a predetermined metal composition vaporizing and mixture, and (2) bringing the mixture into contact with a heated substrate so that an oxide superconducting film is formed on said substrate by a chemical vapor deposition process, wherein laser light is applied onto said substrate during formation of said oxide superconducting film on said substrate, whereby the crystallographic orientation of said oxide superconducting film being formed in the irradiated area of said substrate is such that the c-axis is parallel to the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.