Micro-displacement type information detection probe device and scanning tunneling microscope, atomic force microscope, information processing device by use thereof
US5276672A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 13, 1991 |
| Grant date | Jan 4, 1994 |
| Priority date | — |
| Expiry date | Aug 13, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/873
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro-displacement type information detection probe device capable of following all of the undulation on the .mu.m order, and the periodical surface unevenness on the nm order, of the recording medium or the substrate in performing recording and/or reproduction, by use of, for example, tunnel current, is provided. By forming a cantilever of the first stage by extending the insulation layer laminated on the substrate, providing a lalyer structure having a piezoelectric material sandwiched between the electrode members on the cantilever of the first stage, forming further a cantilever of the second stage on the extension from the tip end of the first cantilever having said layer structure and also forming an information detection probe at the free end of the cantilever of said second stage, and utilizing the reverse piezoelectric effect formed by application of a voltage between the electrodes of said layer structure, the cantilever of the above first stage is displaced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.