Patent · US Expired

Ionization vacuum gauge using a cold micropoint cathode

US5278510A · kind A · utility

20Cited by
3References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 20, 1992
Grant dateJan 11, 1994
Priority date
Expiry dateJul 20, 2012

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2201/30403
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Ionization vacuum gauge comprising, like Bayard Alpert gauges, in a chamber (1) containing an extremely low pressure atmosphere, whose ultra-vacuum degree it is desired to be measured, an electron source cathode (2), a grid (3) for collecting these electrons and surrounding a collector (4) of ions resulting from the impact of the electrons on the gas molecules of the extremely low pressure atmosphere, wherein the electron source is a cold micropoint cathode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.