Ionization vacuum gauge using a cold micropoint cathode
US5278510A · kind A · utility
20Cited by
3References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 20, 1992 |
| Grant date | Jan 11, 1994 |
| Priority date | — |
| Expiry date | Jul 20, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2201/30403
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Ionization vacuum gauge comprising, like Bayard Alpert gauges, in a chamber (1) containing an extremely low pressure atmosphere, whose ultra-vacuum degree it is desired to be measured, an electron source cathode (2), a grid (3) for collecting these electrons and surrounding a collector (4) of ions resulting from the impact of the electrons on the gas molecules of the extremely low pressure atmosphere, wherein the electron source is a cold micropoint cathode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.