Gas supply apparatus
US5279129A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 1, 1992 |
| Grant date | Jan 18, 1994 |
| Priority date | — |
| Expiry date | Jun 1, 2012 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF17C2250/0636
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
According to this invention, a gas supply apparatus includes a bomb, a mass flow controller, a valve, and a heating means. The bomb is filled with a liquid gas. The mass flow controller controls a flow rate of an evaporated gas supplied from the bomb to supply the liquid gas having a vapor pressure lower than an atmospheric pressure to a vacuum vessel evacuated at a predetermined degree of vacuum through a long pipe. A valve is arranged between the bomb and the mass flow controller and performs supply/interruption of the gas flowing into the mass flow controller. A heater heats the mass flow controller, the valve, and a pipe for connecting the mass flow controller and the valve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.