Method for manufacturing panes with high transmissivity in the visible range of the spectrum and with high reflectivity for thermal radiation

US5279722A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Joachim Szczyrbowski · Goldbach, DE
• Christoph Braatz · Großkrotzenburg, DE
• Anton Zmelty · Hösbach, DE

Key dates

• Filing date: Feb 20, 1992
• Grant date: Jan 18, 1994
• Expiry date: Feb 20, 2012

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C03C17/3681
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

Method for the manufacture of panes with high transmissivity in the visible spectral range and with a high reflectivity for thermal radiation. The panes are coated by cathode sputtering. To the substrates S there is applied a first coating of a material of the oxide group ZnO, SnO.sub.2, In.sub.2 O.sub.3, TiO.sub.2, ZrO.sub.2, TaO.sub.5, SiO.sub.2, Al.sub.3 O.sub.3, or mixtures thereof, or of one of the nitrides AlN, Si.sub.3 N.sub.4 or their mixtures, or of aluminum oxynitride, titanium oxynitride, zirconium oxynitride or silicon oxynitride or their mixtures, in a thickness of 20 to 60 nm. A second layer 2 follows, of one of the metals Ag, Cu or mixtures thereof, in a thickness of 5 to 30 nm, a third layer 3 of one of the metals Pd or Pt or their mixtures, in a thickness of 0.2 to 5 nm, preferably 0.5 nm, and a fourth layer 4 which, as a metallic or suboxidic (less than stoichiometric) layer of one of the metals Ti, Cr or mixture thereof, or of an alloy with at least 15% of one of the metals, in a thickness of 0.5 to 5 nm, preferably 1.5 nm. Lastly, a fifth layer 5 is applied, of a metal that is the same as that of the first layer 1.