Methods and means for full-surface interferometric testing of grazing incidence mirrors
US5282015A · kind A · utility
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4Claims
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Key dates
| Filing date | May 24, 1991 |
| Grant date | Jan 25, 1994 |
| Priority date | — |
| Expiry date | May 24, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosed method and means measure the characteristics of an optical device by directing light waves by normal-incidence sub-aperture interferometry on the optical device, shear-polarizing the light directed onto the optical device, and analyzing the results of the interference to obtain the characteristics of the optical device
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.