Patent · US Expired

Method of manufacturing a hot-cathode element

US5283085A · kind A · utility

8Cited by

4References

9Claims

0Family size

Assignee

U.S. Philips Corporation · US

Inventors

Georg Gartner · Aachen, DE
Peter A. Janiel · Würselen, DE

Key dates

Filing date	Apr 20, 1992
Grant date	Feb 1, 1994
Priority date	—
Expiry date	Apr 20, 2012

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C16/56
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A method of manufacturing a hot-cathode element which consists of a rare-earth-oxide-doped refractory metal, notably thoriated tungsten, and which also contains carbon components, first a plurality of layers of the hot-cathode element being successively deposited on a substrate member (2) by means of a CVD process, after which notably the hot-cathode element is separated from the substrate member (2). The strength required for further working of the hot-cathode element is improved in that in the course of the CVD process decarburizing intermediate treatments are performed, the hot-cathode element being carburized during an aftertreatment.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.